X-Lab offers noise-free environment for micro-fabrication and characterization at nanoscale 厦门大学无噪音精密加工与表征实验室

 

X-Lab offers noise-free environment for micro-fabrication and characterization at nanoscale 厦门大学无噪音精密加工与表征实验室

The X-Lab (under construction) in Xiamen University integrates vibration damping, electromagnetic shielding, noise reduction and constant temperature and humidity system to build a noise-free experimental environment for top micro-fabrication and characterization instruments including focus-ion beam, electron-beam lithography and tunneling electron microscope systems.

厦门大学无噪音精密加工与表征实验室(在建),集振动消除、电磁屏蔽、消音、恒温恒湿等性能要求于一体,旨在打造一个为高精密实验设备提供高标准实验环境的科研平台。 目前拟放置聚焦离子束刻蚀系统、电子束光刻系统、透射电子显微镜系统等总价超7000万的仪器设备。

 

 


 

 

300 m2 key area,500 m2 in total; 5 rooms, 10 m underground
共300平米,占地约500平方米 5个房间,深入地下10米

 

 

 

Features设计指标

Vibration damping: Beyond VC-G振动隔绝:VC-G

Electromagnetic shielding: AC ≤7nT电磁屏蔽:交流磁场≤7nT

Constant temperature and humidity: 20±0.1℃/ 40±1%RH恒温恒湿:温度20±0.1℃ 湿度40±1%RH

Acoustic noise: ≤25dB消声系统: ≤25dB


无噪音项目参与建设的人员信息: 魏立霄、师佳、刘俊扬、郑建毅、郭亚、石建光、刘中华、蔡惠坤、黄澜涛、郑珏婷、郭维